DocumentCode

321736

Title

Closed Loop Control Of An Electrostatic Linear Actuator And Its Application To A Micro

Author

Fujita, Hiroyuki ; Omodaka, Akito ; Sim, Kwee Bo ; Hashimoto, Hideki

Author_Institution

The University of Tokyo

Volume

1

fYear

1988

fDate

24-28 Oct. 1988

Firstpage

1

Lastpage

5

Keywords

Electrodes; Electrostatic actuators; Fabrication; Hydraulic actuators; Insulation; Microactuators; Micromachining; Micromotors; Microrelays; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Industrial Electronics Society, 1988. IECON '88. Proceedings., 14 Annual Conference of

Conference_Location

Singapore

Type

conf

DOI

10.1109/IECON.1988.660406

Filename

660406