Title :
Closed Loop Control Of An Electrostatic Linear Actuator And Its Application To A Micro
Author :
Fujita, Hiroyuki ; Omodaka, Akito ; Sim, Kwee Bo ; Hashimoto, Hideki
Author_Institution :
The University of Tokyo
Keywords :
Electrodes; Electrostatic actuators; Fabrication; Hydraulic actuators; Insulation; Microactuators; Micromachining; Micromotors; Microrelays; Voltage;
Conference_Titel :
Industrial Electronics Society, 1988. IECON '88. Proceedings., 14 Annual Conference of
Conference_Location :
Singapore
DOI :
10.1109/IECON.1988.660406
