Design and fabrication of 10/spl times/10 micro SLM array for phase and amplitude modulation

In this paper, a micro spatial light modulator (SLM) for phase and amplitude modulation of incident light is designed and fabricated using surface micromachining technology. In the fields of adaptive optics and pattern recognition system, SLM is used to modulate the phase and amplitude of incident light in order to correct aberration in an optical system through active control of mirror array. An Al micro SLM, which can modulate phase or amplitude of an incident light simultaneously, is designed and fabricated. In order to maximize the fill factor, a hidden spring structure is used and in order to lower driving voltage, a double crab leg type spring is used.