Title :
Modelling and control of hybrid vibration isolation system for high-precision equipment
Author :
Pu, Huayan ; Luo, Xin ; Jiang, Wei ; Dong, Kaka ; Chen, Xuedong
Author_Institution :
State key Lab. of Digital Manuf. Equip. & Technol., Huazhong Univ. of Sci. & Technol., Wuhan, China
Abstract :
This paper presents the dynamic modelling and control of a six degree-of-freedom (DOF) active vibration isolation system for high-precision equipment. First, the six DOF rigid body model of the system is developed. Then, the hybrid controller which is a combination of the feedback controller with the nonmodel based adaptive feedforward compensator is proposed. The feedback controller is based on absolute velocity and feedforward compensation is based on the filtered-x least mean square (FxLMS) algorithm. The results of theoretical analysis and simulation demonstrate the performance and effectiveness of the proposed controller.
Keywords :
compensation; feedback; instrumentation; least mean squares methods; vibration isolation; feedback controller; filtered-x least mean square algorithm; high precision equipment; hybrid vibration isolation control system; nonmodel based adaptive feedforward compensator; six DOF rigid body model; six degree of freedom active vibration isolation system; Adaptive control; Automatic control; Isolation technology; Isolators; Manufacturing; Nonlinear dynamical systems; Optical filters; Programmable control; Sliding mode control; Vibration control; FxLMS; Hybrid Vibration Isolation System; adaptive feedforward control; modelling; vibration control;
Conference_Titel :
Control and Automation (ICCA), 2010 8th IEEE International Conference on
Conference_Location :
Xiamen
Print_ISBN :
978-1-4244-5195-1
Electronic_ISBN :
1948-3449
DOI :
10.1109/ICCA.2010.5524242
