Nano-pressure sensor using high quality photonic crystal cavity resonator

In this paper, we illustrate the design and simulation of photonic crystal (PhC) nano-pressure sensor with high sensitivity and resolution. The sensor is based on two-dimensional photonic crystal (2D-PhC) and has hexagonal lattice of air holes in Si. A waveguide is directly coupled to nanocavity and is configured by eliminating one line of air holes. The nanocavity is formed by modifying the radius of one air hole in the center of lattice. This sensor is designed to use in 1450-1550nm wavelength. Simulation results show that resonant wavelength of nanocavity shifts to longer wavelength with increasing the pressure. The sensitivity of sensor and minimum detectable pressure are respectively obtained as 11.7nm/GPa and 13nN which is improved compared to previous researches.