Title :
Sensitive SWCNTs gas sensor fabricated on a flexible parylene-C substrate
Author :
Xinghui Li ; Selvarasah, S. ; Yu Liu ; Chih-Feng Yang ; Dokmeci, M.R.
Author_Institution :
Vacuum Electron. Nat. Lab., Beijing Vacuum Electron. Res. Inst., Beijing, China
Abstract :
In this paper, we present a flexible and robust SWCNTs based highly sensitive chemiresistor sensor for environmental monitoring applications. Parylene-C is utilized as the substrate in making our flexible sensors. Parylene-C is a light-weight, stress-free, transparent and inert film, is amenable to microfabrication, hence makes a suitable substrate for making flexible nanosensors.
Keywords :
carbon nanotubes; gas sensors; nanosensors; Parylene-C substrate; chemiresistor sensor; environmental monitoring; flexible sensor; microfabrication; sensitive SWCNT gas sensor; single walled carbon nanotube; Methanol;
Conference_Titel :
Vacuum Electron Sources Conference and Nanocarbon (IVESC), 2010 8th International
Conference_Location :
Nanjing
Print_ISBN :
978-1-4244-6645-0
DOI :
10.1109/IVESC.2010.5644305
