Title :
Application of modern image analysis to quantify dispenser cathode surface condition
Author :
Wijangco, M. ; Grant, T.
Author_Institution :
Commun. & Power Industries, Palo Alto, CA, USA
Abstract :
Summary form only given. One of the primary in-process failure modes for guns in vacuum electron devices (VEDs) is poor or low emission due to smearing the cathode pores closed during the fabrication process. The most widely accepted method for verification of open pores, pore size, and distribution is the scanning electron microscope (SEM). However, visual interpretation of the SEM image is still required. A program was launched to evaluate a non-contact, high throughput, optical inspection system that can be utilized to inspect and quantify the dispenser cathode surface porosity or open surface condition by an image analysis application. This presentation summarizes the results of this project.
Keywords :
cathodes; electron guns; feature extraction; inspection; porosity; scanning electron microscopy; SEM; SEM image visual interpretation; VED guns; cathode pore smearing; dispenser cathode surface condition; high throughput inspection; image analysis; low cathode emission; noncontact optical inspection system; open pores; poor cathode emission; pore distribution; pore size; scanning electron microscope; surface condition quantification; surface porosity; vacuum electron devices; Assembly; Cathodes; Digital images; Image analysis; Image converters; Image processing; Inspection; Power industry; Scanning electron microscopy; Testing;
Conference_Titel :
Vacuum Electronics Conference, 2004. IVEC 2004. Fifth IEEE International
Print_ISBN :
0-7803-8261-7
DOI :
10.1109/IVELEC.2004.1316241