Title :
Secondary electron emission database
Author :
Yater, J.E. ; Shih, A. ; Hor, C. ; Levush, B.
Author_Institution :
Electron. Sci. & Technol. Div., Naval Res. Lab., Washington, DC, USA
Abstract :
We have designed a unique measurement system that will enable backscattered electron data collection in the complete (energy and angle) parameter space. Specifically, this design allows for the incident beam energy to extend from 50 eV up to 30 keV. Secondly, sample rotation allows for variation of the incident angle. Finally, and most importantly, the moveable detector, which can travel in two independent angular directions, can cover the entire 3D emission space and measure the emitted electrons with an angular resolution of 2°.
Keywords :
electron backscattering; microwave tubes; secondary electron emission; 3D emission space; 50 eV to 30 keV; angular resolution; backscattered electron data collection; complete parameter space; linear beam devices; measurement system; moveable detector; multistage depressed collectors; sample rotation; secondary electron emission database; total secondary electron yield; Circuits; Copper; Databases; Electrodes; Electron beams; Electron emission; Energy measurement; Geometry; Heating; Laboratories;
Conference_Titel :
Vacuum Electronics Conference, 2004. IVEC 2004. Fifth IEEE International
Print_ISBN :
0-7803-8261-7
DOI :
10.1109/IVELEC.2004.1316242
