Title :
Discrete-event simulation of wafer fabrication facility
Author_Institution :
David Sarnoff Research Center
Keywords :
Discrete event simulation; Fabrication; Furnaces; Implants; Integrated circuit modeling; Plasma applications; Plasma chemistry; Predictive models; Semiconductor device modeling; Wet etching;
Conference_Titel :
Simulation Conference Proceedings, 1988 Winter
Print_ISBN :
0-911801-42-1
DOI :
10.1109/WSC.1988.716245
