• DocumentCode
    3218496
  • Title

    Discrete-event simulation of wafer fabrication facility

  • Author

    Pitts, Karen A.

  • Author_Institution
    David Sarnoff Research Center
  • fYear
    1988
  • fDate
    12-14 Dec 1988
  • Firstpage
    712
  • Lastpage
    718
  • Keywords
    Discrete event simulation; Fabrication; Furnaces; Implants; Integrated circuit modeling; Plasma applications; Plasma chemistry; Predictive models; Semiconductor device modeling; Wet etching;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Simulation Conference Proceedings, 1988 Winter
  • Print_ISBN
    0-911801-42-1
  • Type

    conf

  • DOI
    10.1109/WSC.1988.716245
  • Filename
    716245
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3218496