The need for integrated modelling techniques for micro-devices

Recent years have seen a rapid evolution in the technologies (for example LIGA, bulk micro-machining and surface micro-machining) that may be used to realise a wide a range of microdevices and micro-systems. Such micro-systems can incorporate sensors based on a wide range of transduction principles; for example inertial, thermal, magnetoresistive and piezoresistive based sensors have all been widely described in the open literature. The need for micro-system modelling arises for two reasons: (i) to allow the rapid penetration of these novel and exciting components into the market place it is essential that the design, manufacture and test loop is kept to a minimum without compromising its integrity, hence there is a need to be able to model fabrication processes and device/system behaviour; and (ii) device models can lead to a fuller understanding of device/micro-system operation