DocumentCode
3218672
Title
Stress modelling of microstructures
Author
Beeby, S.P.
Author_Institution
USITT, Southampton Univ., UK
fYear
1997
fDate
35557
Firstpage
42491
Lastpage
42493
Abstract
This paper introduces the use of Finite Element Modelling (FEM) techniques to simulate the performance of silicon resonators and the influence of basic sensor packages. Given the expense incurred and time required to develop prototype silicon sensors such techniques are becoming increasingly important
Keywords
microsensors; Si; finite element model; microstructure; sensor package; silicon resonator; simulation; stress;
fLanguage
English
Publisher
iet
Conference_Titel
Computer Modelling Techniques for Microstructures (Digest No: 1997/077), IEE Half-Day Colloquium on
Conference_Location
London
Type
conf
DOI
10.1049/ic:19970441
Filename
643755
Link To Document