DocumentCode
3219281
Title
Investigation of high frequency vacuum devices using micro-fabrication
Author
Jinjun Feng ; Jun Cai ; Yinfu Hu ; Hanyan Li ; Ye Tang ; Xianping Wu ; Bo Qu ; Tiechang Yan
Author_Institution
Vacuum Electron. Nat. Lab., Beijing Vacuum Electron. Res. Inst., Beijing, China
fYear
2010
fDate
14-16 Oct. 2010
Firstpage
33
Lastpage
34
Abstract
Investigation of high frequency vacuum devices using microfabrication is reported. TWT and BWO design and simulation is discussed. Design is based on theoretical analysis and equivalent circuit method.
Keywords
backward wave oscillators; design; equivalent circuits; microfabrication; micromechanical devices; millimetre wave oscillators; BWO; MEMS; TWT; design; equivalent circuit method; high frequency vacuum devices; microfabrication; millimeter wave structures;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Electron Sources Conference and Nanocarbon (IVESC), 2010 8th International
Conference_Location
Nanjing
Print_ISBN
978-1-4244-6645-0
Type
conf
DOI
10.1109/IVESC.2010.5644352
Filename
5644352
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