Title :
Cold electron emission process in CVD diamond films
Author :
Yater, J.E. ; Shih, A. ; Butler, J.E. ; Pehrsson, P.E.
Author_Institution :
Electron. Sci. & Technol. Div., Naval Res. Lab., Washington, DC, USA
Abstract :
The development of robust cold cathodes would provide improved efficiency, lifetime, and design flexibility for a broad range of devices including RF vacuum electronic devices and flat panel displays. Diamond has been identified as a uniquely promising cold cathode material due to the negative electron affinity (NEA) that is present at hydrogenated diamond surfaces. In this study, we investigate the cold electron emission process in CVD diamond using electron transmission spectroscopy. Specifically, we inject electrons into thin CVD diamond films using a 0-20 keV electron gun, and we then detect and analyze the secondary electrons that are transmitted through the films. In particular, the intensity and energy distribution of the transmitted electrons are measured as a function of the incident beam parameters (E0, I0) and analyzed using Monte Carlo simulations. Reflected secondary-electron-emission spectroscopy (SEES) measurements are also used to evaluate the surface properties of the films.
Keywords :
CVD coatings; Monte Carlo methods; cathodes; cold-cathode tubes; diamond; electron affinity; electron spectroscopy; elemental semiconductors; secondary electron emission; 0 to 20 keV; C; CVD diamond films; Monte Carlo simulations; NEA; RF vacuum electronic devices; SEES measurements; cold cathodes; cold electron emission process; electron gun; electron injection; electron transmission spectroscopy; flat panel displays; hydrogenated diamond surfaces; negative electron affinity; reflected secondary-electron-emission spectroscopy; secondary electrons; transmitted electron energy distribution; transmitted electron intensity; Cathodes; Electron beams; Electron emission; Energy measurement; Flat panel displays; Optical films; Radio frequency; Radiofrequency identification; Robustness; Spectroscopy;
Conference_Titel :
Vacuum Electronics Conference, 2004. IVEC 2004. Fifth IEEE International
Print_ISBN :
0-7803-8261-7
DOI :
10.1109/IVELEC.2004.1316299