• DocumentCode
    3219868
  • Title

    The effects of chemical cleaning on impregnant removal as a function of impregnant type [dispenser cathodes]

  • Author

    Farrell, JJ ; Conkwright, S. ; Tarter, JO

  • Author_Institution
    Semicon Associates, Lexington, KY, USA
  • fYear
    2004
  • fDate
    27-29 April 2004
  • Firstpage
    297
  • Lastpage
    298
  • Abstract
    Summary form only given. A liquid cleaning technique, commonly referred to as SRLV or EDTA cleaning, is often used to clean the emitting surface of dispenser cathodes. The process is based on chemical chelating and removes a shallow layer of impregnant material from the impregnated tungsten matrix. This produces a cathode with more predictable activation behavior and reduces initial evaporation products. Additionally, a thoroughly cleaned surface enhances sputtered coatings adhesion. This investigation reports on the amount of impregnant removed as a function of impregnant type and as a function of time. Methods used to evaluate the amount of material removed include copper back filling and metallographic sampling. Variability in the data is primarily due to the complexity of the BaO-CaO-Al2O3 oxide system and the impregnation process.
  • Keywords
    aluminium compounds; barium compounds; calcium compounds; cathodes; metallography; surface cleaning; tungsten; BaO-CaO-Al2O3-W; EDTA; SRLV; cathode activation behavior; chemical chelating; chemical cleaning effects; copper back filling; dispenser cathode emitting surface; evaporation products; impregnant material removal; impregnated tungsten matrix; liquid cleaning technique; metallographic sampling; sputtered coatings adhesion; Adhesives; Cathodes; Chemical processes; Coatings; Copper; Filling; Inorganic materials; Sampling methods; Surface cleaning; Tungsten;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Electronics Conference, 2004. IVEC 2004. Fifth IEEE International
  • Print_ISBN
    0-7803-8261-7
  • Type

    conf

  • DOI
    10.1109/IVELEC.2004.1316326
  • Filename
    1316326