DocumentCode
3220291
Title
Digest of Papers. Microprocesses and Nanotechnology ´99. 1999 International Microprocesses and Nanotechnology Conference [Front Cover and Table of Contents]
fYear
1999
fDate
6-8 July 1999
Abstract
Presents the table of contents/splash page of the proceedings record.
Keywords
X-ray lithography; biotechnology; electron beam lithography; etching; micromachining; micromechanical devices; nanotechnology; resists; ultraviolet lithography; UV lithography; X-ray lithography; beam-induced reactions; deposition technology; electron beam lithography; etching; inspection; ion beam lithography; metrology; microfabrication; nanodevices; nanofabrication; optical lithography; repair; resists;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 1999. Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International
Conference_Location
Yokohama, Japan
Print_ISBN
4-930813-97-2
Type
conf
DOI
10.1109/IMNC.1999.797446
Filename
797446
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