DocumentCode
3220624
Title
ZnO nanomaterials based SAW ethanol gas sensor
Author
Wu, Yaowu ; Li, Xin ; Liu, Juhua ; Yu, L.M. ; Hu, X.D.
Author_Institution
Sch. of Electron. & Inf. Eng., Xi´an Jiaotong Univ., Xi´an, China
fYear
2010
fDate
14-16 Oct. 2010
Firstpage
80
Lastpage
81
Abstract
In this paper, ZnO nanomaterials with high effective specific surface area have been prepared and subsequently deposited on the SAW transducer as sensitive layer, finally the responses of the sensor to different ethanol gas concentrations were investigated at room temperature.
Keywords
II-VI semiconductors; gas sensors; nanofabrication; nanostructured materials; semiconductor growth; surface acoustic wave sensors; surface acoustic wave transducers; wide band gap semiconductors; zinc compounds; SAW ethanol gas sensor; SAW transducer; ZnO; ZnO nanomaterials; effective specific surface area; ethanol gas concentrations; sensitive layer; temperature 293 K to 298 K; Ethanol; Integrated circuits;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Electron Sources Conference and Nanocarbon (IVESC), 2010 8th International
Conference_Location
Nanjing
Print_ISBN
978-1-4244-6645-0
Type
conf
DOI
10.1109/IVESC.2010.5644417
Filename
5644417
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