Effect of electrode separation and material properties on plasma uniformity in dual frequency capacitively coupled plasma tools

In this talk, we discuss results from a modeling study of the effects of gap distance and material properties on plasma uniformity in DF-CCPs. A 2-dimensional Maxwell equation solver utilizing Finite Difference-Time Domain techniques, capable of resolving wave and electrostatic effects in arbitrary geometries was developed, and incorporated into the Hybrid Plasma Equipment Model. To capture the high frequency heating, excitation rates are provided by spatially dependent electron energy distributions generated by a Monte Carlo simulation. Results will be discussed for plasma properties in DF-CCPs for low frequencies of <10 MHz and high frequencies up to 200 MHz, and gas pressure of <10s mTorr in electronegative gas mixtures.