Title :
63-nm-pitch pit pattern fabrication on polycarbonate surface by direct nano-printing
Author :
Yokoo, A. ; Nakao, M. ; Yoshikawa, H. ; Masuda, H. ; Tamamura, T.
Author_Institution :
NTT Basic Res. Labs., Japan
Abstract :
The authors show that surface deformation of polycarbonate is successfully achieved by direct nano-printing. Using the replication technique, it is possible to fabricate a nano-CD ROM with a storage density of over 185 Gbits/in/sup 2/ directly from a master mold.
Keywords :
CD-ROMs; nanotechnology; polymers; surface treatment; 63 nm; 63-nm-pitch pit pattern fabrication; direct nano-printing; master mold; nano-CD ROM; polycarbonate surface; replication technique; storage density; surface deformation; Fabrication; Manufacturing processes; Nanoscale devices; Photonics; Printing; Production; Read only memory; Silicon carbide; Space technology; Temperature;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1999. Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International
Conference_Location :
Yokohama, Japan
Print_ISBN :
4-930813-97-2
DOI :
10.1109/IMNC.1999.797468
