DocumentCode :
322099
Title :
An Intelligent Robotic Vision System For Wafer Inspection In An Industrial Environment
Author :
Mital, D.P. ; Teoh, E.K. ; Yong, I.N.
Author_Institution :
Nanyang Technological Institute
Volume :
1
fYear :
1988
fDate :
24-28 Oct. 1988
Firstpage :
270
Lastpage :
275
Keywords :
Consumer electronics; Image processing; Inspection; Intelligent robots; Intelligent systems; Machine vision; Production systems; Robot vision systems; Robotics and automation; Service robots;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Industrial Electronics Society, 1988. IECON '88. Proceedings., 14 Annual Conference of
Conference_Location :
Singapore
Type :
conf
DOI :
10.1109/IECON.1988.662381
Filename :
662381
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=322099
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