Title :
Propagation characteristics of longitudinal leaky SAW in Al-grating structure
Author :
Isobe, A. ; Hikita, M. ; Asai, K.
Author_Institution :
Central Res. Lab., Hitachi Ltd., Kokubunji, Japan
Abstract :
New longitudinal leaky SAWs with small propagation losses and high velocities in lithium niobate and lithium tantalate have been found. Their velocities are 6100 to 6500 m/s in lithium niobate and 5200 to 5800 m/s in lithium tantalate. Their propagation losses are almost negligible only in the case of an Al grating structure. For example, the relative Al thickness to the SAW wavelength must be 8.4% for 171°YZ´-LN, while for 133°YZ´-LT, the value must be within 9.2%. These propagation properties were obtained by using a simulator that combined both finite-element and analytical methods. These results were also well confirmed by measuring the impedance responses of one-port SAW resonators in experiments
Keywords :
aluminium; finite element analysis; lithium compounds; losses; surface acoustic wave resonators; surface acoustic waves; ultrasonic propagation; ultrasonic velocity; Al; Al grating structure; Al-grating structure; LiNbO3; LiTaO3; analytical methods; finite-element methods; high velocities; impedance response; lithium niobate; lithium tantalate; longitudinal leaky SAW; longitudinal leaky SAWs; one-port SAW resonators; propagation characteristics; small propagation losses; Analytical models; Electrodes; Equations; Fingers; Impedance measurement; Lithium compounds; Lithium niobate; Propagation losses; SAW filters; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE
Conference_Location :
Toronto, Ont.
Print_ISBN :
0-7803-4153-8
DOI :
10.1109/ULTSYM.1997.662971
