SAW characteristics of diamond-like carbon thin films on various piezoelectric substrates

Author

Kim, Jin Yong ; Kim, Hyeong Joon ; Cho, Hyun Min ; Yang, Hyung Kook ; Park, Jong Chul

Author_Institution

Sch. of Mater. Sci. & Eng., Seoul Nat. Univ., South Korea

Volume

1

fYear

1997

fDate

5-8 Oct 1997

Firstpage

187

Abstract

We studied SAW characteristics of DLC thin films sputter deposited on various substrates, such as Si, quartz, and LiTaO₃. The film properties as well as SAW characteristics showed quite a large dependence on the kind of substrates on which the film was deposited. To examine their SAW properties, 1-port SAW resonators and 2IDT-type SAW filters were fabricated. The ZnO/IDT/DLC/Si(100) multilayer structure showed the 1st mode SAW velocity at kH_DLC=0.262 and kH_ZnO=0.837 was 5614 m/sec. On the contrary, DLC films on quartz and LiTaO₃ were observed to decrease SAW velocity. This contradictory result might be due to different properties of the DLC film according to the substrate on which it was deposited

Keywords

acoustic wave velocity; carbon; piezoelectric materials; sputtered coatings; substrates; surface acoustic wave filters; surface acoustic wave resonators; surface acoustic waves; 1-port SAW resonators; 2IDT-type SAW filters; C; DLC thin films; LiTaO₃; SAW characteristics; SAW velocity; Si; SiO₂; ZnO/IDT/DLC/Si(100) multilayer structure; diamond-like carbon thin films; film properties; piezoelectric substrates; quartz; sputter deposited films; Diamond-like carbon; Nonhomogeneous media; Optical films; Optical resonators; Piezoelectric films; SAW filters; Sputtering; Substrates; Surface acoustic waves; Surface morphology;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE

Conference_Location

Toronto, Ont.

ISSN

1051-0117

Print_ISBN

0-7803-4153-8

Type

conf

DOI

10.1109/ULTSYM.1997.663007

Filename

663007