Title :
SAW characteristics of diamond-like carbon thin films on various piezoelectric substrates
Author :
Kim, Jin Yong ; Kim, Hyeong Joon ; Cho, Hyun Min ; Yang, Hyung Kook ; Park, Jong Chul
Author_Institution :
Sch. of Mater. Sci. & Eng., Seoul Nat. Univ., South Korea
Abstract :
We studied SAW characteristics of DLC thin films sputter deposited on various substrates, such as Si, quartz, and LiTaO3. The film properties as well as SAW characteristics showed quite a large dependence on the kind of substrates on which the film was deposited. To examine their SAW properties, 1-port SAW resonators and 2IDT-type SAW filters were fabricated. The ZnO/IDT/DLC/Si(100) multilayer structure showed the 1st mode SAW velocity at kHDLC=0.262 and kHZnO=0.837 was 5614 m/sec. On the contrary, DLC films on quartz and LiTaO3 were observed to decrease SAW velocity. This contradictory result might be due to different properties of the DLC film according to the substrate on which it was deposited
Keywords :
acoustic wave velocity; carbon; piezoelectric materials; sputtered coatings; substrates; surface acoustic wave filters; surface acoustic wave resonators; surface acoustic waves; 1-port SAW resonators; 2IDT-type SAW filters; C; DLC thin films; LiTaO3; SAW characteristics; SAW velocity; Si; SiO2; ZnO/IDT/DLC/Si(100) multilayer structure; diamond-like carbon thin films; film properties; piezoelectric substrates; quartz; sputter deposited films; Diamond-like carbon; Nonhomogeneous media; Optical films; Optical resonators; Piezoelectric films; SAW filters; Sputtering; Substrates; Surface acoustic waves; Surface morphology;
Conference_Titel :
Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE
Conference_Location :
Toronto, Ont.
Print_ISBN :
0-7803-4153-8
DOI :
10.1109/ULTSYM.1997.663007
