Title :
Dynamic bimorph matrix of end-loaded bimorphs
Author :
Goli, Jayanthy ; Smits, Jan G. ; Ballato, Arthur
Author_Institution :
Dept. of Biomed. Eng., Boston Univ., MA, USA
fDate :
31 May-2 Jun 1995
Abstract :
Piezoelectric homogeneous benders consist of two strips of piezoelectric elements with opposing polarities joined along their length. The matrix elements relating the driving parameter (voltage across the piezoelectric elements) with the response parameters have been calculated for the bimorph with tip mass. These bimorphs can be used to move an object, such as a mirror in optics, a pyramid in atomic force microscopy, or for a chemical sensor at the tip. The effect of such an object at the tip is to lower resonance frequency, which is one of the immediately recognized results. The extra mass affects the capacitance at all frequencies and also changes all the resonance frequencies. The results of this work will enable us to design bimorphs whose deflection and resonance frequency can be controlled
Keywords :
atomic force microscopy; capacitance; chemical sensors; piezoelectric devices; atomic force microscopy; capacitance; chemical sensor; deflection; driving parameter; dynamic bimorph matrix; end-loaded bimorphs; piezoelectric homogeneous benders; resonance frequency; response parameters; tip mass; Atom optics; Atomic force microscopy; Atomic measurements; Chemical elements; Mirrors; Optical sensors; Resonance; Resonant frequency; Strips; Voltage;
Conference_Titel :
Frequency Control Symposium, 1995. 49th., Proceedings of the 1995 IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-2500-1
DOI :
10.1109/FREQ.1995.484086