Micro-system process for education: morphological and electrical characterization

Author

Palun, Lionel ; Montès, Laurent ; Morfouli, Panagiota ; Mathieu, Nathalie ; Guillemot, Nadine ; Descheneaux, Sandrine ; Terrot, Jean-Michel ; Malhaire, Christophe

Author_Institution

ENSERG, Grenoble, France

fYear

2001

fDate

17-18 June 2001

Firstpage

79

Lastpage

80

Abstract

An advanced practical work in characterization of microsystems for education is presented. It concerns the measurements of morphological and electro-mechanical properties of a pressure sensor consisting of piezoelectric poly-Si gauges on a membrane. A variety of techniques is used during the fabrication in a clean room, to control the process and characterize the materials (SiO₂, poly-Si). After complete processing, the sensitivity of the pressure sensor is determined. The influence of the doping, annealing and thickness of the poly-Si gauge is derived. This initiation is developed for the terminal year students of the Grenoble National Engineering School of Electronics (ENSERG) and the Grenoble National Engineering School in Physics (ENSPG).

Keywords

clean rooms; electronic engineering education; micromechanical devices; semiconductor device manufacture; Grenoble National Engineering School in Physics; Grenoble National Engineering School of Electronics; MEMS; Si; annealing; clean room; doping; education; electrical characterization; electro-mechanical properties; micro-system process; morphological characterization; piezoelectric polysilicon gauges; pressure sensor; sensitivity; terminal year students; Absorption; Annealing; Biomembranes; Doping; Etching; Microelectronics; Pressure control; Pressure measurement; Probes; Sensor phenomena and characterization;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronic Systems Education, 2001. Proceedings. 2001 International Conference on

Print_ISBN

0-7695-1156-2

Type

conf

DOI

10.1109/MSE.2001.932423

Filename

932423