Title :
Micro-system process for education: morphological and electrical characterization
Author :
Palun, Lionel ; Montès, Laurent ; Morfouli, Panagiota ; Mathieu, Nathalie ; Guillemot, Nadine ; Descheneaux, Sandrine ; Terrot, Jean-Michel ; Malhaire, Christophe
Author_Institution :
ENSERG, Grenoble, France
Abstract :
An advanced practical work in characterization of microsystems for education is presented. It concerns the measurements of morphological and electro-mechanical properties of a pressure sensor consisting of piezoelectric poly-Si gauges on a membrane. A variety of techniques is used during the fabrication in a clean room, to control the process and characterize the materials (SiO2, poly-Si). After complete processing, the sensitivity of the pressure sensor is determined. The influence of the doping, annealing and thickness of the poly-Si gauge is derived. This initiation is developed for the terminal year students of the Grenoble National Engineering School of Electronics (ENSERG) and the Grenoble National Engineering School in Physics (ENSPG).
Keywords :
clean rooms; electronic engineering education; micromechanical devices; semiconductor device manufacture; Grenoble National Engineering School in Physics; Grenoble National Engineering School of Electronics; MEMS; Si; annealing; clean room; doping; education; electrical characterization; electro-mechanical properties; micro-system process; morphological characterization; piezoelectric polysilicon gauges; pressure sensor; sensitivity; terminal year students; Absorption; Annealing; Biomembranes; Doping; Etching; Microelectronics; Pressure control; Pressure measurement; Probes; Sensor phenomena and characterization;
Conference_Titel :
Microelectronic Systems Education, 2001. Proceedings. 2001 International Conference on
Print_ISBN :
0-7695-1156-2
DOI :
10.1109/MSE.2001.932423
