Title :
Micro-system process for education: fabrication of a pressure sensor
Author :
Montes, Laurent ; Palun, Lionel ; Morfouli, Panagiota ; Mathieu, Nathalie ; Guillemot, Nadine ; Descheneaux, Sandrine ; Terrot, Jean-Michel ; Malhaire, Christophe
Author_Institution :
ENSERG, Grenoble, France
Abstract :
Micro-systems technology is a fast developing field that takes advantage of the well established Si microelectronics technology. In this paper we present the concepts and process flow of the technological elaboration of a pressure sensor. This approach places the emphasis on the key technologies of micro-systems and includes the use of double face photolithography as well as bulk micro-machining. It also benefits standard clean room equipment.
Keywords :
clean rooms; electronic engineering education; micromachining; microsensors; photolithography; pressure sensors; semiconductor device manufacture; Si; bulk micro-machining; clean room equipment; double face photolithography; micro-systems technology; microelectronics technology; pressure sensor; technological elaboration; Biomembranes; Chemical technology; Contacts; Doping; Educational technology; Fabrication; Lithography; Microelectronics; Sensor phenomena and characterization; Wet etching;
Conference_Titel :
Microelectronic Systems Education, 2001. Proceedings. 2001 International Conference on
Print_ISBN :
0-7695-1156-2
DOI :
10.1109/MSE.2001.932429
