Micro-system process for education: fabrication of a pressure sensor

Author

Montes, Laurent ; Palun, Lionel ; Morfouli, Panagiota ; Mathieu, Nathalie ; Guillemot, Nadine ; Descheneaux, Sandrine ; Terrot, Jean-Michel ; Malhaire, Christophe

Author_Institution

ENSERG, Grenoble, France

fYear

2001

fDate

17-18 June 2001

Firstpage

91

Lastpage

92

Abstract

Micro-systems technology is a fast developing field that takes advantage of the well established Si microelectronics technology. In this paper we present the concepts and process flow of the technological elaboration of a pressure sensor. This approach places the emphasis on the key technologies of micro-systems and includes the use of double face photolithography as well as bulk micro-machining. It also benefits standard clean room equipment.

Keywords

clean rooms; electronic engineering education; micromachining; microsensors; photolithography; pressure sensors; semiconductor device manufacture; Si; bulk micro-machining; clean room equipment; double face photolithography; micro-systems technology; microelectronics technology; pressure sensor; technological elaboration; Biomembranes; Chemical technology; Contacts; Doping; Educational technology; Fabrication; Lithography; Microelectronics; Sensor phenomena and characterization; Wet etching;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronic Systems Education, 2001. Proceedings. 2001 International Conference on

Print_ISBN

0-7695-1156-2

Type

conf

DOI

10.1109/MSE.2001.932429

Filename

932429