The design of a miniature injector for microengineered GC system

Author

Wiranto, Goib ; Soegandi, Totok M S ; Muljono, Moch ; Widodo, Slamet ; Hermida, I. Dewa Putu

Author_Institution

Microelectron. Lab, TELKOMA-LIPI, Bandung, Indonesia

fYear

2000

fDate

2000

Firstpage

85

Lastpage

89

Abstract

This paper describes the design and fabrication of a miniature injector for microengineered gas chromatography (GC) system. Both the injector and the micro GC are to be fabricated on silicon using microengineering technology. The injector system incorporates four miniature valves interconnected using short microchannels such that a total of 4 nl sample can be injected into the microengineered GC column. This device should also find wide applications in the area of microfluidic systems

Keywords

chemical sensors; chromatography; design engineering; elemental semiconductors; microactuators; microfluidics; micromachining; microsensors; microvalves; silicon; Si; injector system; microengineered GC column; microengineered GC system; microengineered gas chromatography system; microengineering technology; microfluidic systems; miniature injector; miniature injector design; miniature valves; short microchannel interconnection; silicon; Actuators; Fabrication; Gas chromatography; Laboratories; Microchannel; Microelectronics; Microfluidics; Microvalves; Silicon; Valves;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Electronics, 2000. Proceedings. ICSE 2000. IEEE International Conference on

Conference_Location

Guoman Port Dickson Resort

Print_ISBN

0-7803-6430-9

Type

conf

DOI

10.1109/SMELEC.2000.932439

Filename

932439