DocumentCode

3222383

Title

Design Of Organic Resists For Excirner Laser Lithography

Author

Hinsberg, W.D.

Author_Institution

IBM Almaden Research Center

fYear

1988

fDate

2-4 Nov. 1988

Firstpage

204

Lastpage

206

Keywords

Adhesives; Etching; Image resolution; Lithography; Optical design; Planarization; Reflectivity; Resists; Thermal resistance; Thermal stability;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society Annual Meeting, 1988. Conference Proceedings. LEOS '88.

Conference_Location

Santa Clara, CA, USA

Type

conf

DOI

10.1109/LEOS.1988.689805

Filename

689805