DocumentCode

322306

Title

Polysilicon Micromachining And Industry

Author

King, D.O. ; Ward, M.C.L.

Author_Institution

DERA

fYear

1997

fDate

35754

Firstpage

42370

Lastpage

42371

fLanguage

English

Publisher

iet

Conference_Titel

Recent Advances in Micromachining Techniques (Digest No: 1997/081), IEE Colloquium

Conference_Location

IET

Type

conf

Filename

663256