DocumentCode :
322310
Title :
Micromachining In SOI
Author :
McNie, M.E. ; King, D.O. ; Ward, M.C.L.
Author_Institution :
DERA
fYear :
1997
fDate :
35754
Firstpage :
42491
Lastpage :
42494
fLanguage :
English
Publisher :
iet
Conference_Titel :
Recent Advances in Micromachining Techniques (Digest No: 1997/081), IEE Colloquium
Conference_Location :
IET
Type :
conf
Filename :
663260
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=322310
