• DocumentCode
    322313
  • Title

    Induction Coupled Plasma Processing

  • Author

    Cooke, M.J.

  • Author_Institution
    Oxford Instruments Plasma Technology
  • fYear
    1997
  • fDate
    35754
  • Firstpage
    42583
  • Lastpage
    42583
  • fLanguage
    English
  • Publisher
    iet
  • Conference_Titel
    Recent Advances in Micromachining Techniques (Digest No: 1997/081), IEE Colloquium
  • Conference_Location
    IET
  • Type

    conf

  • Filename
    663263
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=322313