DocumentCode :
322313
Title :
Induction Coupled Plasma Processing
Author :
Cooke, M.J.
Author_Institution :
Oxford Instruments Plasma Technology
fYear :
1997
fDate :
35754
Firstpage :
42583
Lastpage :
42583
fLanguage :
English
Publisher :
iet
Conference_Titel :
Recent Advances in Micromachining Techniques (Digest No: 1997/081), IEE Colloquium
Conference_Location :
IET
Type :
conf
Filename :
663263
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=322313
