DocumentCode

322314

Title

Focused Ion Beams For Microfabrication

Author

Daniel, J.H. ; Moore, D.F. ; Walker, J.F.

Author_Institution

Cambridge University

fYear

1997

fDate

35754

Firstpage

42614

Lastpage

42619

fLanguage

English

Publisher

iet

Conference_Titel

Recent Advances in Micromachining Techniques (Digest No: 1997/081), IEE Colloquium

Conference_Location

IET

Type

conf

Filename

663264