DocumentCode
3223511
Title
Micromechanical membrane switches for microwave applications
Author
Goldsmith, Charles ; Tsen-Hwang Lin ; Powers, B. ; Wen-Rong Wu ; Norvell, B.
Author_Institution
Texas Instrum. Inc., USA
fYear
1995
fDate
16-20 May 1995
Firstpage
91
Abstract
This paper proposes the fabrication of low-cost, low-loss microwave switches using thin metal membranes actuated by electrostatic fields. Measurement of switch test structures and modeling indicates that these devices have a potential 1000 to 2000-GHz figure-of-merit. Various aspects of fabrication, design, performance, and application of these devices are discussed.<>
Keywords
membranes; micromechanical devices; microwave devices; switches; electrostatic fields; micromechanical membrane switches; microwave applications; switch test structures; thin metal membranes; Biomembranes; Contacts; Dry etching; Electrodes; Instruments; Micromechanical devices; Microwave devices; Optical arrays; Optical device fabrication; Optical switches;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 1995., IEEE MTT-S International
Conference_Location
Orlando, FL, USA
ISSN
0149-645X
Print_ISBN
0-7803-2581-8
Type
conf
DOI
10.1109/MWSYM.1995.406090
Filename
406090
Link To Document