MEMS-based multiple fourier-horn silicon ultrasonic atomizer for inhalation drug delivery

Author

Tsai, Chen S. ; Mao, Rong W. ; Lin, Shih K. ; Chien, Eric ; Tsai, Shirley C.

Author_Institution

Dept. of Electr. Eng. & Comp. Sci., Univ. of California, Irvine, CA, USA

fYear

2011

fDate

18-21 Oct. 2011

Firstpage

1119

Lastpage

1122

Abstract

Silicon-based centimeter-sized 1.0 - 2.0 MHz ultrasonic nozzles that employ multiple-Fourier horns and external liquid feeding have been realized to produce micrometer-sized (2.2 to 4.6μm) monodisperse droplets at high throughput (600μl/min) and low electrical drive power (<;1 W). A preliminary battery-operated atomizer module has been constructed for inhalation drug delivery.

Keywords

bioMEMS; drops; drug delivery systems; elemental semiconductors; nozzles; silicon; ultrasonic transducers; MEMS-based multiple Fourier-Horn silicon ultrasonic atomizer; Si; battery-operated atomizer module; electrical drive power; external liquid feeding; frequency 1 MHz to 2 MHz; inhalation drug delivery; micrometer-sized monodisperse droplets; silicon-based centimeter-sized ultrasonic nozzles; size 2.2 mum to 4.6 mum; Acoustics; Atomic clocks; Drives; Drug delivery; Liquids; Throughput; Vibrations; Fourier-horn nozzles; Inhalation drug delivery; MEMS; monodisperse drops; ultrasonic atomization;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2011 IEEE International

Conference_Location

Orlando, FL

ISSN

1948-5719

Print_ISBN

978-1-4577-1253-1

Type

conf

DOI

10.1109/ULTSYM.2011.0275

Filename

6293080