• DocumentCode
    3223982
  • Title

    Nonlinear model reduction with application to rapid thermal processing

  • Author

    Aling, H. ; Kosut, R.L. ; Emami-Naeini, A. ; Ebert, J.L.

  • Author_Institution
    Integrated Syst., Sunnyvale, CA, USA
  • Volume
    4
  • fYear
    1996
  • fDate
    11-13 Dec 1996
  • Firstpage
    4305
  • Abstract
    The proper orthogonal decomposition, also called snapshot method, is a nonlinear model order reduction method where reduction of the size of the state space is achieved using a singular value decomposition of a matrix of snapshots of the state vector. This method has been shown to work well for a simple lumped physical model of a rapid thermal processing chamber. Although a substantial reduction of the number of states is achieved, some numerical computations still need to be performed in the high-dimensional state which is computationally expensive. In this paper we demonstrate how this can be avoided using aggregation of terms, resulting in a significant model simulation speed improvement
  • Keywords
    least squares approximations; nonlinear systems; rapid thermal processing; reduced order systems; singular value decomposition; state-space methods; thermal conductivity; least squares approximation; matrix algebra; nonlinear model order reduction; orthogonal decomposition; rapid thermal processing; singular value decomposition; snapshot; state space; Computational modeling; Equations; High performance computing; Lamps; Matrix decomposition; Rapid thermal processing; Reduced order systems; Singular value decomposition; State-space methods; Thermal conductivity;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Decision and Control, 1996., Proceedings of the 35th IEEE Conference on
  • Conference_Location
    Kobe
  • ISSN
    0191-2216
  • Print_ISBN
    0-7803-3590-2
  • Type

    conf

  • DOI
    10.1109/CDC.1996.577465
  • Filename
    577465