DocumentCode
322401
Title
Micro Servocontrol Of Silicon Diaphragms Driven By Electrostatic Force
Author
Harada, Masanobu ; Sato, Kazuo ; Fujita, Hiroyuki
Author_Institution
The University of Tokyo
Volume
2
fYear
1988
fDate
24-28 Oct. 1988
Firstpage
489
Lastpage
494
Keywords
Capacitive sensors; Displacement control; Electrostatic actuators; Force feedback; Magnetic anisotropy; Microactuators; Perpendicular magnetic anisotropy; Servosystems; Silicon; Voltage control;
fLanguage
English
Publisher
ieee
Conference_Titel
Industrial Electronics Society, 1988. IECON '88. Proceedings., 14 Annual Conference of
Conference_Location
Singapore
Type
conf
DOI
10.1109/IECON.1988.665187
Filename
665187
Link To Document