Title :
Structure of mesoporous Al2O3 thin film obtained by surfactant templating
Author :
Ha, Tae-Jung ; Park, Hyung-Ho ; Baek, Seungsu
Author_Institution :
Dept. of Mater. Sci. & Eng., Yonsei Univ., Seoul, South Korea
Abstract :
These Ordered mesoporous aluminum oxide films with porosity ranges of 5 to 37% were synthesized by evaporation-induced self-assembly (EISA) using surfactant templating. To investigate the effects of mesoporous structure on mechanical properties, changes in pore structure properties including pore distribution and porosity were monitored as functions of surfactant concentration (Pluronic P-123, PEO20PPO70PEO20). The structural properties were analysed using powder X-ray diffractometer and grazing-incidence small-angle x-ray scattering in PLS 4C2 beamline. These alumina films had body-centered cubic pore structure or random-oriented pore structure depending on the surfactant concentration used, and different mechanical properties were obtained depending on the pore structure. Therefore, a control of pore structure in mesoporous materials is the important factor to strengthen the porous structural materials.
Keywords :
X-ray diffraction; X-ray scattering; alumina; evaporation; fracture mechanics; hardness; materials preparation; mesoporous materials; porosity; self-assembly; thin films; Al2O3; PLS 4C2 beamline; alumina films; crack propagation; evaporation-induced self-assembly; grazing incidence small angle X-ray scattering; hardness; mechanical properties; mesoporous structure; ordered mesoporous aluminum oxide thin films; porosity; powder X-ray diffractometry; structural properties; surfactant templates; Aging; Films; Mechanical factors; Mesoporous materials; Thermal stability; X-ray scattering; P-123; mesoporous Al2O3 thin film; ordered pore structure; surfactant templating;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2011 11th IEEE Conference on
Conference_Location :
Portland, OR
Print_ISBN :
978-1-4577-1514-3
Electronic_ISBN :
1944-9399
DOI :
10.1109/NANO.2011.6144296