DocumentCode
3224120
Title
Development of an intelligent scheduler for semiconductor manufacturing facilities
Author
Schorn-DiSalvi, Ellen ; Liquigan, Rex ; Peters, Brett A. ; Smith, Jeffrey S.
Author_Institution
Dept. of Ind. Eng., Texas A&M Univ., College Station, TX, USA
fYear
1995
fDate
13-15 Nov 1995
Firstpage
159
Lastpage
165
Abstract
Considerable academic research has investigated the topic of scheduling in manufacturing systems. This research investigates the available academic literature and commercial scheduling systems with respect to their applicability in semiconductor manufacturing systems. It recommends a design of an "intelligent scheduler" that attempts to use global information about the fab status and combines the applicable analytical methods from the academic literature with a simulation based evaluation tool into a decision support environment.
Keywords
production control; semiconductor device manufacture; decision support environment; global information; intelligent scheduler; semiconductor manufacturing facilities; simulation; Dispatching; Fabrication; Industrial engineering; Job shop scheduling; Manufacturing processes; Manufacturing systems; Production facilities; Routing; Semiconductor device manufacture; Semiconductor materials;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop, 1995. ASMC 95 Proceedings. IEEE/SEMI 1995
ISSN
1078-8743
Print_ISBN
0-7803-2713-6
Type
conf
DOI
10.1109/ASMC.1995.484359
Filename
484359
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