DocumentCode
3224160
Title
ULTRA-SOI: New generation of SOI CMOS model with physics based dynamic depletion characteristics
Author
He, Frank ; Zhang, Jian ; Zhang, Lining ; Zhou, Xingye ; Zhou, Zhize ; Lin, Xinnan
Author_Institution
Key Lab. of Integrated Microsyst., Peking Univ., Shenzhen, China
fYear
2009
fDate
25-27 Dec. 2009
Firstpage
44
Lastpage
49
Abstract
ULTRA-SOI is a new generation of the channel-potential-based non-charge-sheet model for the dynamic depletion (DD) Silicon-On-Insulator (SOI) MOSFET, developed by TSRC group in EECS department of Peking University with many year efforts. The model is formulated with a fully physical derivation from the Poisson´s equation to solve the potential along the vertical direction of the silicon film. The model is intended to retain as much detail physics as possible while providing sufficient flexibility to add advanced physical effects that arise from the development of new features in processing technology. Most small dimension effects have been incorporated in the model and being verified by extensive numerical simulation and experimental data. At present, the formulation of the I-V, C-V, and non-quasi-static (NQS) model has been completed.
Keywords
CMOS integrated circuits; MOSFET; Poisson equation; elemental semiconductors; semiconductor device models; silicon; silicon-on-insulator; EECS department; MOSFET; Peking University; Poisson´s equation; SOI CMOS model; Si; TSRC group; ULTRA-SOI; channel-potential-based non-charge-sheet model; dynamic depletion silicon-on-insulator; physics based dynamic depletion characteristics; Character generation; Integral equations; MOSFET circuits; Numerical simulation; Physics; Poisson equations; Semiconductor device modeling; Semiconductor films; Semiconductor process modeling; Silicon; SOI-MOSFET; charge-sheet approximation; compact model; device physics; non-charge-sheet;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Solid-State Circuits, 2009. EDSSC 2009. IEEE International Conference of
Conference_Location
Xi´an
Print_ISBN
978-1-4244-4297-3
Electronic_ISBN
978-1-4244-4298-0
Type
conf
DOI
10.1109/EDSSC.2009.5394192
Filename
5394192
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