Title :
Equipment management system (EMS)
Author :
Yurtsever, Tanju ; Comerford, Matt
Author_Institution :
Motorola Inc., Austin, TX, USA
Abstract :
Equipment Management System (EMS) is a software tool used to monitor and track equipment states, restrictions and PM schedules in real time. EMS has been designed and customized to support the MOS-2 die production facility. The system provides graphical representation of the entire factory. Color coded icons represent equipment´s current state (i.e. qualification, production, unscheduled maintenance, etc.). Preventative maintenance schedules and restrictions are indicated using different patterns. Users can Click on these icons and use pull down menus to change, modify and display current or historical information. The purpose of the system is to collect variable equipment data to facilitate equipment utilization improvement and to increase the visibility of the production areas In this paper, we discuss the system description, implementation and training process, impact of EMS on manufacturing and benefits of the systems.
Keywords :
computerised monitoring; engineering graphics; integrated circuit manufacture; maintenance engineering; manufacturing data processing; production engineering computing; real-time systems; semiconductor device manufacture; MOS-2 die production facility; PM schedules; color coded icons; equipment management system; equipment states; equipment status monitoring system; equipment utilization improvement; graphical representation; preventative maintenance schedules; real time operation; software tool; Displays; Job shop scheduling; Medical services; Monitoring; Preventive maintenance; Production facilities; Production systems; Qualifications; Real time systems; Software tools;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1995. ASMC 95 Proceedings. IEEE/SEMI 1995
Print_ISBN :
0-7803-2713-6
DOI :
10.1109/ASMC.1995.484380