DocumentCode :
3224946
Title :
Porosity and thickness effect of porous silicon layer on photoluminescence spectra
Author :
Suhaimi, M. H. Fadzilah ; Rusop, M. ; Abdullah, Saad
Author_Institution :
NANO-SciTech Centre (NST), Univ. Teknol. MARA (UiTM), Shah Alam, Malaysia
fYear :
2013
fDate :
23-26 June 2013
Firstpage :
115
Lastpage :
118
Abstract :
The porous silicon nanostructures was prepared by electrochemical etching of p-type silicon wafer. Porous silicon prepared by using different current density and fix etching time with assistance of halogen lamp. The physical structure of porous silicon measured by the parameters used which know as experimental factor. In this work, we select one of those factors to correlate which optical properties of porous silicon. We investigated the surface morphology by using Surface Profiler (SP) and photoluminescence using Photoluminescence (PL) spectrometer. Different physical characteristics of porous silicon produced when current density varied. Surface profiler used to measure the thickness of porous and the porosity calculated using mass different of silicon. Photoluminescence characteristics of porous silicon depend on their morphology because the size and distribution of pore its self will effect to their exciton energy level. At J=30 mA/cm2 the shorter wavelength produced and it followed the trend of porosity with current density applied.
Keywords :
current density; elemental semiconductors; etching; excitons; nanoporous materials; photoluminescence; porosity; porous semiconductors; silicon; surface morphology; Si; current density; electrochemical etching; etching time; exciton energy level; halogen lamp; optical properties; photoluminescence spectra; porosity; porous silicon layer; porous silicon nanostructures; surface morphology; surface profiler; Current density; Density measurement; Etching; Periodic structures; Silicon; Thickness measurement; Porous silicon; current density; photoluminescence; porosity; thickness;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Technology, Informatics, Management, Engineering, and Environment (TIME-E), 2013 International Conference on
Conference_Location :
Bandung
Print_ISBN :
978-1-4673-5730-2
Type :
conf
DOI :
10.1109/TIME-E.2013.6611975
Filename :
6611975
Link To Document :
بازگشت