Ferrite nanoparticles for MEMS technology sensors and actuators

The synthesis of various soft and hard magnetic ferrites and their use in microelectromechanical systems (MEMS) are presented in this paper. We investigate the feasibility of screen-printing process of ferrite magnetic nanoparticles produced by carbon combustion synthesis of oxides (CCSO). These ferrites can be used as magnetic structure with dimensions between ten to hundreds of micrometers. The microstructured magnetic thin films can be used in MEMS for fabrication of magnetic arrays by using a simple, high-yield and cost-effective method. The use of nanoparticles, instead of μm-grain powders, allows fabrication of integrated thin films structures uniquely suitable in MEMS. The printed magnetic nanocomposites can serve for fabrication of different magnetic arrays, matrics and components for broad applications such as microscale sensors, actuators, transducers, high frequency resonators, etc. Proof-of-concept MEMS sensors and actuators are fabricated and reported.