DocumentCode :
322581
Title :
Film manometric thermocouple transducer
Author :
Bychkovskii, Roman
Author_Institution :
State Univ., Lviv, Ukraine
fYear :
1997
fDate :
26-29 Aug 1997
Firstpage :
745
Lastpage :
747
Abstract :
An analog of the PMT-2 tube manometer thermocouple transducer fabricated using thin-film technology is described. The transducer may have a wider range of application because the source and the heat detector are separated and the output signal is higher due to larger number of thermocouples. The transducers fabricated on mica substrates operate at pressures ranging from 760 to 10-5, 10-1 to 103 and 50 to 1 torr, those on polyimide substrates operate in the range of 103-102 torr. The transducers have passed mechanical and climatic, a 500-h time-to-failure, and ozone tests
Keywords :
manometers; pressure transducers; thermocouples; thin film resistors; 103 to 102 torr; 1E-1 to 1E-3 torr; 50 to 1 torr; 760 to 1E-5 torr; climatic tests; film manometric thermocouple transducer; larger number of thermocouples; mica substrates; ozone tests; polyimide substrates; pressure transducer; thin-film technology; time-to-failure; Detectors; Heat transfer; Packaging; Pressure measurement; Resistors; Substrates; Thermal conductivity; Thermal resistance; Transducers; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Thermoelectrics, 1997. Proceedings ICT '97. XVI International Conference on
Conference_Location :
Dresden
ISSN :
1094-2734
Print_ISBN :
0-7803-4057-4
Type :
conf
DOI :
10.1109/ICT.1997.667637
Filename :
667637
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=322581
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