Low-stress transfer of graphene and its tuneable resistance by remote plasma treatments in hydrogen

A novel low-stress process for transferring thermal CVD single-layer graphene from copper foils to destination substrates is demonstrated. Electrical and optical characteristics of as-transferred graphene and the hydrogen remote-plasma modified graphene are presented. Although graphene is mechanically very strong considering its atomically thin structure, large-area single-layer graphene is practically very fragile especially during handling and transfer from one substrate to another. Handling of large-area free-standing graphene is even more challenging. Combination of effective transfer and surface treatment of graphene by hydrogenation allows fine tuning of its electrical resistivity for practical applications.