X-pod: A novel small footprint multi-legged piezoelectric single crystal actuator concept

Multi-legged piezoelectric single crystal actuators of small foot-prints with an X-pod approach, namely, Tripod and Tetrapod have been conceptualized, each leg being a unimorph driven by Pb(Zn_1/3Nb_2/3)O₃-(6-7)%PbTiO₃ (PZN-(6-7)%PT) single crystals of [110]^L×[001]^T cut. Both finite element analysis and experimental investigation are carried out to evaluate the performance of the Tripod and Tetrapod actuators. When operated at 0.57 kV/mm, both actuators exhibit axial displacement of nearly 60 μm. A blocking force of about 10 N and 14 N is observed for the Tripod and the Tetrapod, respectively. In addition to small footprints, other attractive features of the actuators include greater flexibility to modify the leg geometry and their inclination to suit the application.