Electrode size effect under PFM characterization of PZT-film on silicon structures with micro- and nanometric top electrodes

Author

Bravina, S.L. ; Morozovsky, N.V. ; Eliseev, E.A. ; Morozovska, A.N. ; Costecalde, J. ; Soyer, C. ; Remiens, D. ; Deresmes, D.

Author_Institution

Inst. of Phys., Nat. Acad. of Sci. of Ukraine, Kiev, Ukraine

fYear

2011

fDate

24-27 July 2011

Firstpage

1

Lastpage

3

Abstract

Experimental and theoretical studies of PFM hysteresis loops directed on elucidating the influence of top electrode lateral size on PFM loop parameters were performed for PZT-film/Pt-Ti/Si-substrate structures.

Keywords

dielectric hysteresis; electrodes; ferroelectric coercive field; ferroelectric thin films; lead compounds; piezoelectric thin films; piezoelectricity; PFM characterization; PFM hysteresis loops; PFM loop parameters; PZT-PtTi-Si; PZT-film/Pt-Ti/Si-substrate structure; Si; electrode size effect; micrometric top electrode; nanometric top electrode; silicon structures; top electrode lateral size; LGD theory; PFM hysteresis loop; PZT-film/Pt-Ti/Si-substrate; decoupling approximation; local coercive voltage; top electrode size effect;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics (ISAF/PFM), 2011 International Symposium on and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials

Conference_Location

Vancouver, BC

Print_ISBN

978-1-4577-1162-6

Electronic_ISBN

978-1-4577-1161-9

Type

conf

DOI

10.1109/ISAF.2011.6014002

Filename

6014002