Title :
Electrode size effect under PFM characterization of PZT-film on silicon structures with micro- and nanometric top electrodes
Author :
Bravina, S.L. ; Morozovsky, N.V. ; Eliseev, E.A. ; Morozovska, A.N. ; Costecalde, J. ; Soyer, C. ; Remiens, D. ; Deresmes, D.
Author_Institution :
Inst. of Phys., Nat. Acad. of Sci. of Ukraine, Kiev, Ukraine
Abstract :
Experimental and theoretical studies of PFM hysteresis loops directed on elucidating the influence of top electrode lateral size on PFM loop parameters were performed for PZT-film/Pt-Ti/Si-substrate structures.
Keywords :
dielectric hysteresis; electrodes; ferroelectric coercive field; ferroelectric thin films; lead compounds; piezoelectric thin films; piezoelectricity; PFM characterization; PFM hysteresis loops; PFM loop parameters; PZT-PtTi-Si; PZT-film/Pt-Ti/Si-substrate structure; Si; electrode size effect; micrometric top electrode; nanometric top electrode; silicon structures; top electrode lateral size; LGD theory; PFM hysteresis loop; PZT-film/Pt-Ti/Si-substrate; decoupling approximation; local coercive voltage; top electrode size effect;
Conference_Titel :
Applications of Ferroelectrics (ISAF/PFM), 2011 International Symposium on and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials
Conference_Location :
Vancouver, BC
Print_ISBN :
978-1-4577-1162-6
Electronic_ISBN :
978-1-4577-1161-9
DOI :
10.1109/ISAF.2011.6014002
