• DocumentCode
    3226957
  • Title

    Multi-layer graphene grid and nanowire fabrication and printing

  • Author

    Rahman, Masudur ; Norton, Michael L.

  • Author_Institution
    Dept. of Chem., Marshall Univ., Huntington, WV, USA
  • fYear
    2011
  • fDate
    15-18 Aug. 2011
  • Firstpage
    592
  • Lastpage
    595
  • Abstract
    Molecular sensor fabrication requires the development of methods to produce nanostructures and transfer them onto useful substrates. This paper will briefly describe methods of patterning and printing of highly oriented pyrolytic graphite (HOPG). HOPG has been patterned at the micron and ~100 nanometer scale, using oxygen plasma etching and phase-shift lithography, respectively. The micron scale patterned HOPG was exfoliated using a thermal tape printing process, to transfer highly crystalline multi-layer graphene (MLG) constructs onto glass substrates. A soft lithography technique, stamping, was employed to print 100nm wide few layer graphene (FLG) nanowires onto PDMS substrates.
  • Keywords
    graphene; graphite; multilayers; nanofabrication; nanopatterning; nanowires; soft lithography; sputter etching; C; PDMS substrates; SiO2; crystalline multilayer graphene; glass substrates; highly oriented pyrolytic graphite; micron-scale patterning; molecular sensor fabrication; multilayer graphene grid; nanowire fabrication; oxygen plasma etching; phase-shift lithography; size 100 nm; soft lithography; stamping; thermal tape printing; Glass; Lithography; Nanobioscience; Plasmas; Printing; Scanning electron microscopy; Substrates; Graphene; PDMS; Phase-Shift lithography; nanowire; soft lithography;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology (IEEE-NANO), 2011 11th IEEE Conference on
  • Conference_Location
    Portland, OR
  • ISSN
    1944-9399
  • Print_ISBN
    978-1-4577-1514-3
  • Electronic_ISBN
    1944-9399
  • Type

    conf

  • DOI
    10.1109/NANO.2011.6144440
  • Filename
    6144440