DocumentCode
3226957
Title
Multi-layer graphene grid and nanowire fabrication and printing
Author
Rahman, Masudur ; Norton, Michael L.
Author_Institution
Dept. of Chem., Marshall Univ., Huntington, WV, USA
fYear
2011
fDate
15-18 Aug. 2011
Firstpage
592
Lastpage
595
Abstract
Molecular sensor fabrication requires the development of methods to produce nanostructures and transfer them onto useful substrates. This paper will briefly describe methods of patterning and printing of highly oriented pyrolytic graphite (HOPG). HOPG has been patterned at the micron and ~100 nanometer scale, using oxygen plasma etching and phase-shift lithography, respectively. The micron scale patterned HOPG was exfoliated using a thermal tape printing process, to transfer highly crystalline multi-layer graphene (MLG) constructs onto glass substrates. A soft lithography technique, stamping, was employed to print 100nm wide few layer graphene (FLG) nanowires onto PDMS substrates.
Keywords
graphene; graphite; multilayers; nanofabrication; nanopatterning; nanowires; soft lithography; sputter etching; C; PDMS substrates; SiO2; crystalline multilayer graphene; glass substrates; highly oriented pyrolytic graphite; micron-scale patterning; molecular sensor fabrication; multilayer graphene grid; nanowire fabrication; oxygen plasma etching; phase-shift lithography; size 100 nm; soft lithography; stamping; thermal tape printing; Glass; Lithography; Nanobioscience; Plasmas; Printing; Scanning electron microscopy; Substrates; Graphene; PDMS; Phase-Shift lithography; nanowire; soft lithography;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology (IEEE-NANO), 2011 11th IEEE Conference on
Conference_Location
Portland, OR
ISSN
1944-9399
Print_ISBN
978-1-4577-1514-3
Electronic_ISBN
1944-9399
Type
conf
DOI
10.1109/NANO.2011.6144440
Filename
6144440
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