An efficient design tool for transmission line on SIMOX substrates

Author

Raskin, J.P. ; Huynen, I. ; Gillon, R. ; Vanhoenacker, D. ; Colinge, J.P.

Author_Institution

Microwave Lab., Katholieke Univ., Leuven, Belgium

fYear

1996

fDate

30 Sep-3 Oct 1996

Firstpage

28

Lastpage

29

Abstract

Planar metallizations on surface-passivated semiconductor substrates have become a familiar form of signal transmission with the rapid development of the monolithic integrated circuit technology now extending into the microwave frequency region. However, little is known at present concerning the transmission properties of such a composite structure. In this paper we present the behaviour of the SOI substrate as function of frequency. A new model of transmission line is developed and compared with measurements of CPW lines realized on various SIMOX substrates

Keywords

MMIC; SIMOX; UHF integrated circuits; coplanar waveguides; integrated circuit design; integrated circuit metallisation; substrates; transmission line theory; variational techniques; CPW lines; SIMOX substrates; SOI substrate; Si; composite structure; design tool; monolithic integrated circuit technology; planar metallizations; surface-passivated semiconductor substrates; transmission line model; transmission properties; Distributed parameter circuits; Integrated circuit metallization; Integrated circuit technology; Microwave frequencies; Microwave technology; Monolithic integrated circuits; Planar transmission lines; Substrates; Transmission line measurements; Transmission lines;

fLanguage

English

Publisher

ieee

Conference_Titel

SOI Conference, 1996. Proceedings., 1996 IEEE International

Conference_Location

Sanibel Island, FL

ISSN

1078-621X

Print_ISBN

0-7803-3315-2

Type

conf

DOI

10.1109/SOI.1996.552477

Filename

552477