Title :
Tunable RF filters with graded-composition, MOCVD-deposited BST Capacitors
Author :
Kalkur, Thottam S. ; Sbrockey, Nick ; Loung, M. ; Cole, M.W. ; Tompa, Gary
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Colorado, Colorado Springs, CO, USA
Abstract :
In this paper, we report the electrical characteristics of compositionally graded BST films deposited by metal organic chemical vapor deposition (MOCVD) on Pt coated sapphire substrates. We characterized the temperature dependent capacitance of graded composition BST capacitors along with single composition BST capacitors. We also report the fabrication and temperature dependent characterization of tunable RF filters fabricated with this technology.
Keywords :
MOCVD; band-pass filters; barium compounds; radiofrequency filters; strontium compounds; thin film capacitors; BST film; Ba1-xSrxTiO3; graded-composition MOCVD-deposited BST capacitor; metal organic chemical vapor deposition; temperature dependent capacitance; tunable RF bandpass filter; Band pass filters; Capacitance; Capacitors; Films; MOCVD; Resonator filters; Temperature dependence; BST; Tunable filters; graded composition;
Conference_Titel :
Applications of Ferroelectrics (ISAF/PFM), 2011 International Symposium on and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials
Conference_Location :
Vancouver, BC
Print_ISBN :
978-1-4577-1162-6
Electronic_ISBN :
978-1-4577-1161-9
DOI :
10.1109/ISAF.2011.6014112
