Temperature dependence of short wavelength GaInP/AlGaInP DFB lasers

Author

Gauggel, H.-P. ; Geng, C. ; Scholz, F. ; Schweizer, H.

Author_Institution

4. Phys. Inst., Stuttgart Univ., Germany

Volume

2

fYear

1995

fDate

30 Oct-2 Nov 1995

Firstpage

153

Abstract

Distributed feedback (DFB) lasers in the visible wavelength range are of great interest for the application as single-mode light sources for optical memories, for atomic absorption spectroscopy and as master oscillators in high power and spectrally coherent master oscillator power amplifier systems. In all these cases stable single mode emission and low temperature sensitivity are most important. We report on the fabrication and lasing characteristics of first order GaInP/AlGaInP DFB lasers. The lasers were fabricated in a two-step low-pressure metallorganic vapour-phase-epitaxy (MOVPE) process, interrupted by the formation of the DFB gratings. The definition of the gratings (periods between 105 nm and 110 nm, spacing 0.5 nm) was done by electron beam lithography, followed by a low-damage RIE-ECR dry etching process

Keywords

III-V semiconductors; aluminium compounds; cyclotron resonance; diffraction gratings; distributed feedback lasers; electron beam lithography; gallium compounds; indium compounds; laser accessories; laser beams; laser feedback; laser modes; laser tuning; light sources; optical fabrication; semiconductor lasers; sputter etching; vapour phase epitaxial growth; -10 to 60 C; 690.1 to 700.1 nm; DFB gratings; DFB lasers; GaInP-AlGaInP; GaInP/AlGaInP; RIE-ECR dry etching process; atomic absorption spectroscopy; distributed feedback lasers; electron beam lithography; electron cyclotron resonance etching; fabrication; high power systems; lasing characteristics; low temperature sensitivity; master oscillators; optical memories; reactive ion etching; single mode emission; single-mode light sources; spectrally coherent master oscillator power amplifier systems; two-step low-pressure metallorganic vapour-phase-epitaxy; visible wavelength range; Atom lasers; Atom optics; Distributed feedback devices; Gratings; Laser feedback; Laser modes; Light sources; Oscillators; Power lasers; Temperature dependence;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society Annual Meeting, 1995. 8th Annual Meeting Conference Proceedings, Volume 1., IEEE

Conference_Location

San Francisco, CA

Print_ISBN

0-7803-2450-1

Type

conf

DOI

10.1109/LEOS.1995.484642

Filename

484642