Influence of platinum bottom electrode on the piezoelectric performance of hot RF sputtered PZT films

Author

Kaden, Dirk ; Quenzer, Hans-Joachim ; Wagner, Bernhard ; Kratzer, Martin ; Castaldi, Lorenzo ; Heinz, Bernd ; Mamazza, Robert

Author_Institution

MEMS Dept., Fraunhofer Inst. for Silicon Technol., Itzehoe, Germany

fYear

2011

fDate

24-27 July 2011

Firstpage

1

Lastpage

4

Abstract

Ferroelectric PZT thin films have been in-situ deposited on 8-inch wafers by a high volume production sputtering tool. The films were grown on oxidized Si substrates covered either with sputtered Ti/TiO₂/Pt, sputtered Ti/TiO₂/Pt/TiO₂ or evaporated Ti/Pt bottom electrodes and investigated with respect to their chemical composition, crystallographic and dielectric properties. Moreover the d_33,f and the e_31,f coefficients have been examined. At a chuck temperature of 600 °C the intended chemical composition is achieved to nucleate and grow the ferroelectric perovskite phase with a minimum of secondary non-piezoelectric phases. A Zr/(Zr+Ti) ratio of 0.53 has been achieved matching to the morphotropic phase boundary. Notable high e_31,f and d_33,f coefficients of 101 pm/V and -13.8 C/m², respectively, have been obtained.

Keywords

ferroelectric thin films; ferroelectricity; lead compounds; nucleation; piezoelectric thin films; piezoelectricity; sputter deposition; PZT; Si; Ti-Pt; Ti-TiO₂-Pt; Ti-TiO₂-Pt-TiO₂; chemical composition; chuck temperature; crystallographic properties; dielectric properties; evaporated Ti-Pt bottom electrode; ferroelectric PZT thin films; ferroelectric perovskite phase; high volume production sputtering tool; hot RF sputtered PZT films; morphotropic phase boundary; nucleation; oxidized Si substrates; piezoelectric performance; platinum bottom electrode; secondary nonpiezoelectric phases; size 8 in; sputtered Ti-titania-Pt bottom electrode; sputtered Ti-titania-Pt-titania bottom electrode; temperature 600 degC; wafers; Electrodes; Films; Lead; Measurement by laser beam; Substrates; Temperature measurement; Zirconium; PZT; Pt; d33,f; e31,f; electrode; ferroelectric; piezoelectric;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics (ISAF/PFM), 2011 International Symposium on and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials

Conference_Location

Vancouver, BC

Print_ISBN

978-1-4577-1162-6

Electronic_ISBN

978-1-4577-1161-9

Type

conf

DOI

10.1109/ISAF.2011.6014133

Filename

6014133