Title :
Preparation of VO2 microbolometer for CO2 gas detection
Author :
Wang, Li-Xia ; Li, Xing-Ao
Author_Institution :
Coll. of Sci., Nanjing Univ. of Posts & Telecommun., Nanjing, China
Abstract :
The VO2 microbolometer has been prepared by micro electrical mechanical system (MEMS) bulk-silicon process for the application of infrared gas detection. The characteristic of the prepared microbolometer is tested. The experiments are carried out for detecting CO2 gas concentration using the VO2 microbolometer as detector. The results show that the responsibility is ~18.1kV/W, the detectivity is about 1.37 × 108 cm Hz1/2/W, and the thermal time constant is ~72.4ms. The gas sensing results shows that the prepared microbolometer can be used for CO2 gas sensing.
Keywords :
gas sensors; infrared detectors; vanadium compounds; CO2; MEMS bulk-silicon process; VO2; gas detection; infrared gas detection; microbolometer; microelectrical mechanical system; thermal time constant; Amorphous materials; Costs; Fabrication; Gas detectors; Infrared detectors; Infrared sensors; Micromachining; Micromechanical devices; Silicon; Thermal conductivity; CO2; MEMS; infrared gas detection; microbolometer; vanadium dioxide;
Conference_Titel :
Microwave and Millimeter Wave Technology (ICMMT), 2010 International Conference on
Conference_Location :
Chengdu
Print_ISBN :
978-1-4244-5705-2
DOI :
10.1109/ICMMT.2010.5524843
