Title :
Acoustic wave filter based on periodically poled lithium niobate
Author :
Courjon, E. ; Bassignot, F. ; Ulliac, G. ; Ballandras, S.
Author_Institution :
FEMTO-ST Inst., Besancon, France
Abstract :
We present results on the development of an acoustic bandpass filter based on periodically poled ferroelectric domains in lithium niobate. The fabrication of Periodically Poled Transducers (PPT) operating in the range 20 - 650 MHz has been achieved on a 3" 500 μm thick wafer. This kind of transducer enables to excite elliptical as well as longitudinal modes, yielding phase velocity of about 3800 and 6500 m.s-1 respectively. We propose then a new type of acoustic bandpass filter based on the use of PPTs instead of classical IDTs. The design and the fabrication of such a filter are presented as well as the experimental measurements. Finally we demonstrate the feasibility of such a PPTs-based filter.
Keywords :
acoustic filters; electric domains; ferroelectric devices; lithium compounds; piezoelectric transducers; IDT; LiNbO3; acoustic bandpass filter; acoustic wave filter; frequency 20 MHz to 650 MHz; periodically poled ferroelectric domains; periodically poled lithium niobate; periodically poled transducers; phase velocity; size 500 mum; Band pass filters; Electrodes; Fabrication; Filtering theory; Lithium niobate; Resonator filters; Transducers; Bandpass filter; Periodically Poled Transducer (PPT); ferroelecticity; lithium niobate; piezoelectricity;
Conference_Titel :
Applications of Ferroelectrics (ISAF/PFM), 2011 International Symposium on and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials
Conference_Location :
Vancouver, BC
Print_ISBN :
978-1-4577-1162-6
Electronic_ISBN :
978-1-4577-1161-9
DOI :
10.1109/ISAF.2011.6014161